The structural, electrical, and optical properties of SnO2 films prepared by reactive magnetron sputtering: Influence of substrate temperature and O2 flow rate
Ye Tao, B.L. Zhu, Yuting Yang, Jun Wu, Xinwei Shi
Topics & Concepts
Materials scienceSubstrate (aquarium)SputteringElectrical resistivity and conductivityAmorphous solidSputter depositionElectrical conductorPhotoluminescenceTransmittanceCavity magnetronVolumetric flow rateThin filmAnalytical Chemistry (journal)Composite materialOptoelectronicsNanotechnologyChemistryCrystallographyGeologyEngineeringOceanographyQuantum mechanicsPhysicsChromatographyElectrical engineeringGas Sensing Nanomaterials and SensorsZnO doping and propertiesTransition Metal Oxide Nanomaterials