Electrical conductivity and structural properties of a-C:N films deposited by ion-assisted pulse-arc sputtering
Oleg A. Streletskiy, Ilya A. Zavidovskiy, O.Yu. Nischak, S. V. Dvoryak
Topics & Concepts
Electrical resistivity and conductivityX-ray photoelectron spectroscopyAnalytical Chemistry (journal)ConductivityIonMaterials scienceElectron energy loss spectroscopySpectroscopyNitrogenSputteringTransmission electron microscopyChemistryThin filmNanotechnologyNuclear magnetic resonancePhysical chemistryQuantum mechanicsPhysicsOrganic chemistryChromatographyElectrical engineeringEngineeringDiamond and Carbon-based Materials ResearchIon-surface interactions and analysisMetal and Thin Film Mechanics