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Experimental and theoretical analysis of single-sided and double-sided chemical mechanical polishing of sapphire wafers

Zhongyang Li, Zhaohui Deng, Jimin Ge, Tao Liu, Linlin Wan

2022The International Journal of Advanced Manufacturing Technology20 citationsDOI

Topics & Concepts

SapphireChemical-mechanical planarizationPolishingWaferMaterials scienceSurface roughnessSurface integritySurface finishOptoelectronicsComposite materialOpticsLaserPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationDiamond and Carbon-based Materials Research
Experimental and theoretical analysis of single-sided and double-sided chemical mechanical polishing of sapphire wafers | Litcius