Facile fabrication of functional 3D micro-nano architectures with focused ion beam implantation and selective chemical etching
Vivek Garg, Rakesh G. Mote, Jing Fu
Topics & Concepts
Materials scienceNanolithographyFabricationEtching (microfabrication)NanotechnologySiliconNanostructureFocused ion beamBlack siliconNanowireIon implantationIon beamOptoelectronicsNanomeshPlasma etchingIsotropic etchingNano-IonGrapheneChemistryLayer (electronics)Organic chemistryPathologyComposite materialAlternative medicineMedicineNanowire Synthesis and ApplicationsAdvanced Surface Polishing TechniquesNanofabrication and Lithography Techniques