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Recent advances on MEMS based Infrared Thermopile detectors

Sofiane Ben Mbarek, Nouha Alcheikh, Mohammad I. Younis

2022Microsystem Technologies29 citationsDOI

Topics & Concepts

ThermopileMicroelectromechanical systemsThermocoupleDetectorInfraredThermoelectric effectComputer scienceMaterials scienceNanotechnologyEngineeringElectrical engineeringPhysicsOpticsThermodynamicsAdvanced Thermoelectric Materials and DevicesGas Sensing Nanomaterials and SensorsTransition Metal Oxide Nanomaterials
Recent advances on MEMS based Infrared Thermopile detectors | Litcius