Surface ripples induced by gas cluster ion beam on copper surface at elevated temperatures
A.E. Ieshkin, Д.С. Киреев, Kseniya E. Ozerova, B. R. Senatulin
Topics & Concepts
Materials scienceCopperCluster (spacecraft)IonBeam (structure)Surface (topology)Ion beamMetallurgyOpticsChemistryComputer scienceMathematicsOrganic chemistryPhysicsProgramming languageGeometryIon-surface interactions and analysisDiamond and Carbon-based Materials ResearchIntegrated Circuits and Semiconductor Failure Analysis