Chemical vapor deposition of clean and pure MoS<sub>2</sub> crystals by the inhibition of MoO<sub>3−x</sub> intermediates
Ran Guan, Junxi Duan, Aiheng Yuan, Zhuofan Wang, Shuai Yang, Luoqiao Han, Bo Zhang, Dejun Li, Birong Luo
Abstract
A sublimated sulfur vapor <italic>versus</italic> evaporated MoO<sub>3</sub> vapor with transition from low to high sulfur supersaturation would cause different CVD products transformed from MoS<sub>2</sub>–MoO<sub>3−x</sub> composites to clean and pure MoS<sub>2</sub> crystals accordingly.
Topics & Concepts
Chemical vapor depositionSulfurSupersaturationDeposition (geology)Materials scienceInorganic chemistryChemistryChemical engineeringCrystallographyNanotechnologyMetallurgyOrganic chemistryEngineeringSedimentBiologyPaleontology2D Materials and ApplicationsMXene and MAX Phase MaterialsAdvanced Photocatalysis Techniques