Design and fabrication of an absolute pressure MEMS capacitance vacuum sensor based on silicon bonding technology
Mahui Xu, Yongjian Feng, Xiaodong Han, Xin Ke, Gang Li, Yibo Zeng, Huangping Yan, Detian Li
Topics & Concepts
Microelectromechanical systemsCapacitanceMaterials sciencePressure sensorFabricationOptoelectronicsMiniaturizationDiaphragm (acoustics)NanotechnologyElectrical engineeringElectrodeChemistryMechanical engineeringLoudspeakerEngineeringAlternative medicineMedicinePhysical chemistryPathologyAdvanced MEMS and NEMS TechnologiesNanowire Synthesis and ApplicationsMechanical and Optical Resonators