Polishing tool with phyllotactic distributed through-holes for photochemically combined mechanical polishing of N-type gallium nitride wafers
Liwei Ou, Sai Guo, Yan Zhe, Zhigang Dong, Renke Kang, Dongming Guo, Kang Shi
Topics & Concepts
PolishingWaferChemical-mechanical planarizationMaterials scienceGallium nitrideSurface roughnessOptoelectronicsComposite materialLayer (electronics)Semiconductor materials and devicesAdvanced Surface Polishing TechniquesMetal and Thin Film Mechanics