Effect of nitrogen doping on the microstructure and thermal stability of diamond-like carbon coatings containing silicon and oxygen
Jihua Peng, Yang Xiao, Manzhong Yang, Jiacheng Liao
Topics & Concepts
Materials scienceMicrostructureX-ray photoelectron spectroscopyRaman spectroscopyTernary operationDiamond-like carbonAnalytical Chemistry (journal)SiliconChemical engineeringComposite materialThin filmMetallurgyNanotechnologyOrganic chemistryChemistryProgramming languageEngineeringOpticsPhysicsComputer scienceDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices