Adaptive fault detection framework for recipe transition in semiconductor manufacturing
Jaewoong Shim, Sungzoon Cho, Euiseok Kum, Suho Jeong
Topics & Concepts
RecipeSemiconductor device fabricationComputer scienceFault detection and isolationRetrainingDegradation (telecommunications)Adaptation (eye)Real-time computingWaferArtificial intelligenceEngineeringActuatorElectrical engineeringOpticsTelecommunicationsFood scienceChemistryBusinessInternational tradePhysicsIndustrial Vision Systems and Defect DetectionMineral Processing and GrindingNon-Destructive Testing Techniques