A PZT MEMS loudspeaker with a quasi-closed diaphragm
Yifei Ma, Yao Lu, Ning Deng, Qincheng Zheng, Ke Cao, Haopu Wang, Huikai Xie
Topics & Concepts
Diaphragm (acoustics)LoudspeakerParyleneMicroelectromechanical systemsMaterials scienceVoltageAcousticsPiezoelectricityElectrical engineeringEngineeringComposite materialOptoelectronicsPhysicsPolymerAdvanced MEMS and NEMS TechnologiesAdvanced Sensor and Energy Harvesting MaterialsAcoustic Wave Resonator Technologies