Stable stoichiometric copper nitride thin films via reactive sputtering
Md Maidul Islam, Daniel G. Georgiev
Topics & Concepts
Analytical Chemistry (journal)SputteringSubstrate (aquarium)ArgonNitrogenCopperStoichiometryThin filmMaterials scienceCrystalliteElectrical resistivity and conductivityDeposition (geology)ChemistryMetallurgyNanotechnologyChromatographyOrganic chemistryBiologyEngineeringSedimentGeologyPaleontologyElectrical engineeringOceanographyZnO doping and propertiesCopper-based nanomaterials and applicationsSemiconductor materials and devices