Recognition of unknown wafer defect via optimal bin embedding technique
MinSik Chu, Seong‐Mi Park, Jiin Jeong, Kyong-Hee Joo, Yongyeol Lee, Jihoon Kang
Topics & Concepts
WaferProcess (computing)Semiconductor device fabricationTransformation (genetics)EmbeddingFeature (linguistics)Reliability (semiconductor)Artificial intelligenceComputer sciencePattern recognition (psychology)Quality (philosophy)BinSimilarity (geometry)Set (abstract data type)EngineeringData miningReliability engineeringAlgorithmImage (mathematics)Operating systemEpistemologyLinguisticsProgramming languageGenePower (physics)PhysicsQuantum mechanicsChemistryBiochemistryPhilosophyElectrical engineeringIndustrial Vision Systems and Defect DetectionSurface Roughness and Optical MeasurementsImage and Object Detection Techniques