Effects of nitrilotriacetic acid and corrosion inhibitor on cobalt barrier chemical–mechanical polishing: Experimental and density functional theory analysis
Xinbo Zhang, Guofeng Pan, Lianjun Hu, Hao Wang, Chenwei Wang
Topics & Concepts
Nitrilotriacetic acidAdsorptionDensity functional theoryChemistryX-ray photoelectron spectroscopyChemical-mechanical planarizationCorrosion inhibitorCobaltOxideChemical stateInorganic chemistryCorrosionNuclear chemistryChelationChemical engineeringPhysical chemistryComputational chemistryOrganic chemistryLayer (electronics)EngineeringAdvanced Surface Polishing TechniquesCorrosion Behavior and InhibitionAdvanced materials and composites