Micro-Transfer Printing of Lithium Niobate on Silicon Nitride
Tom Vanackere, Maximilien Billet, Camiel Op de Beeck, Stijn Poelman, Günther Roelkens, Stéphane Clemmen, Bart Kuyken
Abstract
Successful micro-transfer printing of lithium niobate on a silicon nitride platform is demonstrated. A proof of concept electro-optical modulator is fabricated using this hybrid integration method which shows a half-wave voltage-length product VπLπ=5.5 Vcm and insertion losses of 7 dB.
Topics & Concepts
Lithium niobateMaterials scienceSilicon nitrideTransfer printingOptoelectronicsSiliconNitrideLithium (medication)NanotechnologyComposite materialEndocrinologyLayer (electronics)MedicinePhotorefractive and Nonlinear OpticsPhotonic and Optical DevicesFerroelectric and Piezoelectric Materials