SR-FABNet: Super-Resolution branch guided Fourier attention detection network for efficient optical inspection of nanoscale wafer defects
Leisheng Chen, Kai Meng, Hangying Zhang, Junquan Zhou, Peihuang Lou
Topics & Concepts
WaferNanoscopic scaleMaterials scienceFourier transformWafer-scale integrationResolution (logic)OpticsNanotechnologyOptoelectronicsComputer scienceArtificial intelligencePhysicsQuantum mechanicsIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisSurface Roughness and Optical Measurements