Investigation of electrochemical behavior and polishing mechanism in electrochemical mechanical polishing of cobalt
Fangjin Xie, Min Zhong, Wenhu Xu
Topics & Concepts
PolishingMaterials scienceCobaltElectrochemistryX-ray photoelectron spectroscopySurface roughnessChemical-mechanical planarizationPolarization (electrochemistry)Composite materialSurface finishDielectric spectroscopyMetallurgyElectrodeChemical engineeringChemistryEngineeringPhysical chemistryAdvanced Surface Polishing TechniquesAdvanced Machining and Optimization TechniquesAdvanced machining processes and optimization