Understanding of Si3N4-H3PO4 reaction chemistry for the control of Si3N4 dissolution kinetics
Taegun Park, Changjin Son, Taehyeon Kim, Sangwoo Lim
Topics & Concepts
DissolutionSN2 reactionPhosphoric acidChemistryNucleophileKineticsReaction rateInorganic chemistryPhysical chemistryStereochemistryOrganic chemistryCatalysisPhysicsQuantum mechanicsAdvanced ceramic materials synthesisElectronic and Structural Properties of OxidesSemiconductor materials and devices