A polymer–semiconductor–ceramic cantilever for high-sensitivity fluid-compatible microelectromechanical systems
Nahid Hosseini, Matthias Neuenschwander, Jonathan D. Adams, Santiago H. Andany, Oliver Peric, Marcel Winhold, Maria Carmen Giordano, Vinayak Shantaram Bhat, Marcos Penedo, Dirk Grundler, Georg E. Fantner
Topics & Concepts
CantileverMicroelectromechanical systemsCeramicMaterials scienceSensitivity (control systems)SemiconductorPolymerOptoelectronicsComposite materialElectronic engineeringEngineeringMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesForce Microscopy Techniques and Applications