Atomic Simulations of Deformation Mechanism of 3C-SiC Polishing Process with a Rolling Abrasive
Zhihua Yin, Pengzhe Zhu, Baozhen Li, Yimeng Xu, Rao Li
Topics & Concepts
Materials scienceRotational speedAbrasiveRotation (mathematics)PolishingTransverse planeRotation around a fixed axisComposite materialChemical-mechanical planarizationDeformation (meteorology)Angular velocitySilicon carbideMolecular dynamicsNormal forceMechanicsGeometryClassical mechanicsStructural engineeringPhysicsMathematicsQuantum mechanicsEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics