Electropolishing-enhanced corrosion resistance mechanisms of 316L stainless steel in semiconductor applications: Inclusion regulation, passive film optimization and aggressive microdroplet suppression
Chaoran Ma, Zhice Yang, Xi Zhuo Jiang, Peng Zhou, Yang Zhao, Yong Hua, Cheng Su, Tao Zhang, Fuhui Wang
Topics & Concepts
ElectropolishingMaterials scienceCorrosionMetallurgySemiconductorMicrostructureFlatness (cosmology)OxidePitting corrosionComposite materialParticle (ecology)Semiconductor devicePolishingSemiconductor device fabricationInclusion (mineral)TribocorrosionCorrosion Behavior and InhibitionHydrogen embrittlement and corrosion behaviors in metalsElectrodeposition and Electroless Coatings