Atomistic modeling of physical vapor deposition on complex topology substrates
Michael G. Eberhardt, Andrèa M. Hodge, Paulo S. Branı́cio
Topics & Concepts
SputteringMaterials sciencePhysical vapor depositionSputter depositionSurface roughnessThin filmDeposition (geology)Surface finishSubstrate (aquarium)Molecular physicsChemical physicsTopology (electrical circuits)NanotechnologyChemistryComposite materialSedimentCombinatoricsMathematicsBiologyPaleontologyOceanographyGeologyCopper Interconnects and ReliabilityMetal and Thin Film Mechanicsnanoparticles nucleation surface interactions