Litcius/Paper detail

Controlling the heat, flow, and oxygen transport by double-partitions during continuous Czochralski (CCz) silicon crystal growth

Thi-Hoai-Thu Nguyen, Jyh-Chen Chen, Chun‐Hsien Li

2022Materials Science in Semiconductor Processing17 citationsDOI

Topics & Concepts

Crucible (geodemography)Micro-pulling-downMaterials scienceSiliconOxygenConvectionCrystal growthHeat transferFree surfaceDiffusionPartition (number theory)MineralogyAnalytical Chemistry (journal)ThermodynamicsMetallurgyCrystallographyChemistryChromatographyOrganic chemistryCombinatoricsComputational chemistryMathematicsPhysicsSolidification and crystal growth phenomenaSilicon and Solar Cell TechnologiesThin-Film Transistor Technologies