Oxidation resistance and mechanical properties of AlTiZrHfTa(-N) high entropy films deposited by reactive magnetron sputtering
Djallel Eddine Touaibia, Sofiane Achache, Abdelhakim Bouissil, Jaâfar Ghanbaja, Sylvie Migot, Mohammad Arab Pour Yazdi, Frédéric Schuster, Benoît Panicaud, Frédéric Sanchette, Mohamed El Garah
Topics & Concepts
Materials scienceAmorphous solidSputter depositionSputteringNitrogenAnalytical Chemistry (journal)SapphireNitrideCavity magnetronThin filmCrystallographyChemistryComposite materialNanotechnologyOpticsPhysicsOrganic chemistryLayer (electronics)ChromatographyLaserHigh Entropy Alloys StudiesMetal and Thin Film MechanicsHigh-Temperature Coating Behaviors