Structural, electrical, and optical properties of Si-doped ZnO thin films prepared via supercycled atomic layer deposition
Chae-Seon Hong, Kyung-Mun Kang, Minjae Kim, Yue Wang, Taehee Kim, Chan Lee, Hyung‐Ho Park
Topics & Concepts
Wurtzite crystal structureMaterials scienceAtomic layer depositionCrystallinityThin filmDopingBand gapAnalytical Chemistry (journal)Pulsed laser depositionDielectricZincNanotechnologyOptoelectronicsChemistryMetallurgyComposite materialChromatographyZnO doping and propertiesGa2O3 and related materialsCopper-based nanomaterials and applications