On the design of piezoelectric MEMS microspeaker for the sound pressure level enhancement
Hsu-Hsiang Cheng, Sung-Cheng Lo, Zi-Rong Huang, Yijia Wang, Mingching Wu, Weileun Fang
Topics & Concepts
Diaphragm (acoustics)Microelectromechanical systemsAcousticsTotal harmonic distortionSpring (device)Sound pressureVoltagePiezoelectricityDistortion (music)Materials scienceEngineeringElectronic engineeringElectrical engineeringVibrationStructural engineeringOptoelectronicsPhysicsAmplifierCMOSAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesInnovative Energy Harvesting Technologies