Silicon nitride deposited by laser assisted plasma enhanced chemical vapor deposition for next generation organic electronic devices
Ki Hyun Kim, Ki Seok Kim, You Jin Ji, Ji Eun Kang, Geun Young Yeom
Topics & Concepts
Plasma-enhanced chemical vapor depositionMaterials scienceSilicon nitrideChemical vapor depositionPassivationSiliconMicroelectronicsOptoelectronicsThin filmNitrideLayer (electronics)NanotechnologyThin-Film Transistor TechnologiesSemiconductor materials and devicesZnO doping and properties