Low temperature defect passivation technology for semiconductor electronic devices—supercritical fluids treatment process
Ting‐Chang Chang, Po‐Hsun Chen, Chung‐Yung Lin, Chih‐Cheng Shih
Topics & Concepts
PassivationMaterials scienceOptoelectronicsSemiconductorWaferTransistorSemiconductor deviceNanotechnologyLayer (electronics)Electrical engineeringEngineeringVoltageSemiconductor materials and devicesThin-Film Transistor TechnologiesSilicon Carbide Semiconductor Technologies