Molecular dynamics simulation of the combination effect of the tip inclination and scratching direction on nanomachining of single crystal silicon
Yongda Yan, Zihan Li, Junshuai Jia, Jiqiang Wang, Yanquan Geng
Topics & Concepts
ScratchingMaterials scienceSiliconGroove (engineering)Molecular dynamicsEnhanced Data Rates for GSM EvolutionMonocrystalline siliconMechanicsComposite materialChemistryOptoelectronicsPhysicsComputer scienceComputational chemistryTelecommunicationsMetallurgyAdvanced Surface Polishing TechniquesForce Microscopy Techniques and ApplicationsIntegrated Circuits and Semiconductor Failure Analysis