Effect of nitrogen content on structural and mechanical properties of AlTiZrTaHf(-N) high entropy films deposited by reactive magnetron sputtering
Mohamed El Garah, Djallel Eddine Touaibia, Sofiane Achache, Alexandre Michau, Elizaveta Sviridova, Павел С. Постников, Mohamed M. Chehimi, Frédéric Schuster, Frédéric Sanchette
Topics & Concepts
Materials scienceNitrideX-ray photoelectron spectroscopySputteringAmorphous solidNitrogenSputter depositionAnalytical Chemistry (journal)High entropy alloysChromium nitrideArgonThin filmChemical engineeringMetallurgyComposite materialCrystallographyNanotechnologyAlloyChemistryEngineeringLayer (electronics)PhysicsAtomic physicsChromatographyQuantum mechanicsMetal and Thin Film MechanicsHigh Entropy Alloys StudiesDiamond and Carbon-based Materials Research