Fast sputter deposition of MoOx/metal/MoOx transparent electrodes on glass and PET substrates
Selina Goetz, Rachmat Adhi Wibowo, Martin Bauch, Neha Bansal, Giovanni Ligorio, Emil List, Christian Linke, Enrico Franzke, Jörg Winkler, Markus Valtiner, Théodoros Dimopoulos
Topics & Concepts
Materials scienceElectrodeOptoelectronicsIndium tin oxideAmorphous solidPolyethylene terephthalateSputter depositionWork functionSheet resistanceOLEDSubstrate (aquarium)Layer (electronics)DielectricSputteringComposite materialThin filmNanotechnologyOceanographyChemistryGeologyOrganic chemistryPhysical chemistryZnO doping and propertiesAdvanced Sensor and Energy Harvesting MaterialsConducting polymers and applications