The discharge characteristics of low-pressure capacitively coupled argon plasma with Langmuir probe
Guiqin Yin, Shanshan Gao, Zhaohui Liu, Qianghua Yuan
Topics & Concepts
Langmuir probeAtomic physicsElectron temperaturePlasmaArgonPhysicsElectronExcitationPlasma diagnosticsPlasma parametersElectron densityQuantum mechanicsPlasma Diagnostics and ApplicationsMetal and Thin Film MechanicsElectrohydrodynamics and Fluid Dynamics