Litcius/Paper detail

Importance of layer distribution in Ni and Au based ohmic contacts to p-type GaN

Clément Mauduit, Taoufik Slimani Tlemçani, Meiling Zhang, Arnaud Yvon, N. Vivet, Matthew Charles, R. Gwoziecki, Daniel Alquier

2023Microelectronic Engineering16 citationsDOIOpen Access PDF

Topics & Concepts

Ohmic contactMaterials scienceAnnealing (glass)Non-blocking I/OTransmission electron microscopyContact resistanceNickelOptoelectronicsAnalytical Chemistry (journal)Layer (electronics)MetallurgyNanotechnologyChemistryBiochemistryCatalysisChromatographyGaN-based semiconductor devices and materialsSemiconductor materials and devicesGa2O3 and related materials