Microelectromechanical Systems for Nanomechanical Testing: Displacement- and Force-Controlled Tensile Testing with Feedback Control
Cai Li, Guangming Cheng, Haiyan Wang, Yong Zhu
Topics & Concepts
Materials scienceMicroelectromechanical systemsCapacitive sensingDisplacement (psychology)CreepTensile testingActuatorStructural engineeringStress (linguistics)Ultimate tensile strengthComposite materialNanotechnologyEngineeringElectrical engineeringPsychologyPhilosophyPsychotherapistLinguisticsForce Microscopy Techniques and ApplicationsMechanical and Optical ResonatorsAdvanced MEMS and NEMS Technologies