Development of Zr- and Gd-doped porous ceria (pCeO2) abrasives for achieving high-quality and high-efficiency oxide chemical mechanical polishing
Ailian Chen, Shirui Wang, Jie Pan, Tianyu Wang, Yang Chen
Topics & Concepts
Materials scienceRaman spectroscopySurface roughnessDopingCerium oxideChemical engineeringOxideAnalytical Chemistry (journal)NanotechnologyComposite materialMetallurgyPhysicsChromatographyChemistryOptoelectronicsOpticsEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites