A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications
Kurmendra Kurmendra, Rajesh Kumar
Topics & Concepts
Microelectromechanical systemsCapacitive sensingRadio frequencyAmplifierElectrical engineeringVoltageRF switchResonatorElectronic engineeringCoplanar waveguideEngineeringMaterials scienceOptoelectronicsTelecommunicationsCMOSMicrowaveAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical Resonators