Litcius/Paper detail

A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications

Kurmendra Kurmendra, Rajesh Kumar

2020Microsystem Technologies87 citationsDOI

Topics & Concepts

Microelectromechanical systemsCapacitive sensingRadio frequencyAmplifierElectrical engineeringVoltageRF switchResonatorElectronic engineeringCoplanar waveguideEngineeringMaterials scienceOptoelectronicsTelecommunicationsCMOSMicrowaveAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical Resonators