High-throughput thermodynamic analysis of the CVD of SiC from the SiCl4-CH4-H2 system
Wei Huang, Junjun Wang, Qingfang Xu, Meijun Yang, Kai Liu, Jian Peng, Chuanbin Wang, Rong Tu, Song Zhang
Topics & Concepts
Chemical vapor depositionMaterials scienceDeposition (geology)CALPHADGraphiteAnalytical Chemistry (journal)Phase (matter)Chemical engineeringPhase diagramNanotechnologyChemistryMetallurgyEnvironmental chemistryOrganic chemistryBiologySedimentPaleontologyEngineeringSilicon Carbide Semiconductor TechnologiesAdvanced ceramic materials synthesisSemiconductor materials and devices