Computational <i>Ab Initio</i> Approaches for Area-Selective Atomic Layer Deposition: Methods, Status, and Perspectives
Fabian Pieck, Ralf Tonner
Topics & Concepts
Atomic layer depositionAb initioDeposition (geology)Layer (electronics)Computational chemistryMaterials scienceNanotechnologyChemistryChemical physicsOrganic chemistryGeologySedimentPaleontologySemiconductor materials and devicesElectronic and Structural Properties of OxidesElectron and X-Ray Spectroscopy Techniques