A low-cost multilayer piezoelectric actuator for ultrasonic motor stator driving fabricated by a low-temperature co-fired ceramic process
Xiaopin Hu, Teng Cao, Boquan Wang, Zhiyi Wen, Kang Yan, Dawei Wu
Topics & Concepts
Materials scienceUltrasonic motorActuatorStatorCeramicPiezoelectricityUltrasonic sensorProcess (computing)Composite materialAcousticsMechanical engineeringElectrical engineeringComputer scienceEngineeringPhysicsOperating systemFerroelectric and Piezoelectric MaterialsDielectric materials and actuatorsPiezoelectric Actuators and Control