Nonlinear behavior analysis of electrostatically actuated multilayer anisotropic microplates with residual stress
Zhikang Li, Libo Zhao, Jie Li, Yihe Zhao, Tingzhong Xu, Zichen Liu, Guoxi Luo, Shiming Zhang, Kai‐Ming Hu, Tyler Hoffman, Shahid Saghir, Dejiang Lu, Wenming Zhang, Zhuangde Jiang
Topics & Concepts
AnisotropyNonlinear systemMaterials scienceResidual stressFinite element methodVoltageGalerkin methodMicroelectromechanical systemsDeflection (physics)Hydrostatic equilibriumMechanicsHydrostatic pressureStructural engineeringClassical mechanicsComposite materialPhysicsOpticsEngineeringNanotechnologyQuantum mechanicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsForce Microscopy Techniques and Applications