Single step electron-beam lithography archiving lift-off for T-gate in high electron mobility transistor fabrication
Baoquan Sun, Peng Zhang, Teng Zhang, Shaofei Shangguan, Sheng Wu, Xiaohua Ma
Topics & Concepts
UndercutPhotoresistElectron-beam lithographyMaterials scienceHigh-electron-mobility transistorLithographyTransistorOptoelectronicsFabricationInduced high electron mobility transistorCathode rayResistPhotolithographyLift (data mining)Electron mobilitySubstrate (aquarium)ElectronLayer (electronics)NanotechnologyElectrical engineeringPhysicsComputer scienceEngineeringVoltageQuantum mechanicsMedicineData miningOceanographyGeologyComposite materialAlternative medicinePathologyAdvancements in Photolithography TechniquesSemiconductor materials and devicesIntegrated Circuits and Semiconductor Failure Analysis