In-Zn-Sn-O thin film based transistor with high-k HfO2 dielectric
Yang Gyu Bak, Ji Woon Park, Ye Jin Park, Mohd Zahid Ansari, Sook NamGung, Bo Yeon Cho, Soo‐Hyun Kim, Hee Young Lee
Topics & Concepts
Materials scienceAtomic layer depositionThin-film transistorAnalytical Chemistry (journal)Thin filmDielectricAnnealing (glass)Band gapOptoelectronicsLayer (electronics)MetallurgyNanotechnologyChemistryChromatographyThin-Film Transistor TechnologiesSemiconductor materials and devicesZnO doping and properties