Machine learning enabled optimization of showerhead design for semiconductor deposition process
Zeqing Jin, Dahyun Daniel Lim, Xueying Zhao, Meenakshi Mamunuru, Sassan Roham, Grace X. Gu
Topics & Concepts
Semiconductor device fabricationFabricationBenchmark (surveying)WaferBayesian optimizationSemiconductorProcess (computing)Deposition (geology)Computer scienceEngineeringMaterials scienceArtificial intelligenceNanotechnologyOptoelectronicsPathologyBiologyPaleontologyOperating systemAlternative medicineSedimentGeodesyMedicineGeographyAdvanced Multi-Objective Optimization AlgorithmsHeat Transfer and OptimizationIndustrial Vision Systems and Defect Detection