Atomistic kinetic Monte Carlo simulation on atomic layer deposition of TiN thin film
Sangtae Kim, Hyungmin An, Sang-Min Oh, Jisu Jung, Byungjo Kim, Sang Ki Nam, Seungwu Han
Topics & Concepts
TinKinetic Monte CarloAtomic layer depositionThin filmChemical physicsMicroelectronicsDensity functional theoryMonte Carlo methodMaterials scienceDeposition (geology)DesorptionChemistryAdsorptionComputational chemistryNanotechnologyPhysical chemistryMetallurgyMathematicsSedimentPaleontologyBiologyStatisticsSemiconductor materials and devicesMetal and Thin Film MechanicsCopper Interconnects and Reliability