Deposition and Fabrication of Sputtered Bismuth Telluride and Antimony Telluride for Microscale Thermoelectric Energy Harvesters
Samer Haidar, Yuan Gao, Yifan He, Jane E. Cornett, Baoxing Chen, Nigel J. Coburn, Colm Glynn, Marc T. Dunham, Kenneth E. Goodson, Nian X. Sun
Topics & Concepts
Bismuth tellurideThermoelectric effectSeebeck coefficientMaterials scienceThermoelectric materialsSputter depositionTelluriumTellurideSputteringCavity magnetronOptoelectronicsDeposition (geology)Thin filmAnalytical Chemistry (journal)MetallurgyNanotechnologyChemistryComposite materialThermal conductivityPaleontologyThermodynamicsBiologySedimentChromatographyPhysicsAdvanced Thermoelectric Materials and DevicesThermal Radiation and Cooling TechnologiesTopological Materials and Phenomena