Nano-scale surface of ZrO2 ceramics achieved efficiently by peanut-shaped and heart-shaped SiO2 abrasives through chemical mechanical polishing
Lei Xu, Hong Lei
Topics & Concepts
Materials sciencePolishingCubic zirconiaCeramicChemical-mechanical planarizationX-ray photoelectron spectroscopySurface roughnessScanning electron microscopeComposite materialSurface finishMetallurgyChemical engineeringEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced ceramic materials synthesis