Performance optimization of SiC piezoresistive pressure sensor through suitable piezoresistor design
Baohua Tian, Haiping Shang, Lihuan Zhao, Weibing Wang
Topics & Concepts
Piezoresistive effectFinite element methodMaterials scienceDeflection (physics)Silicon carbidePressure sensorSensitivity (control systems)Optimal designMicroelectromechanical systemsNonlinear systemBoundary value problemTransverse planeStructural engineeringMechanical engineeringAcousticsComputer scienceElectronic engineeringComposite materialEngineeringOptoelectronicsMathematical analysisMachine learningOpticsPhysicsMathematicsQuantum mechanicsAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesNanowire Synthesis and Applications