Substrate stoichiometry changes during pulsed laser deposition: a case study on SrTiO <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si4.svg"> <mml:msub> <mml:mrow/> <mml:mn>3</mml:mn> </mml:msub> </mml:math>
Matthäus Siebenhofer, Tobias M. Huber, Werner Artner, Jürgen Fleig, Markus Kubicek
Topics & Concepts
Materials sciencePulsed laser depositionThin filmAnalytical Chemistry (journal)ConductivityStoichiometryElectrical resistivity and conductivitySubstrate (aquarium)Deposition (geology)Layer (electronics)Dielectric spectroscopyComposite materialNanotechnologyChemistryElectrodeGeologyBiologyChromatographyElectrical engineeringOceanographyElectrochemistryOrganic chemistrySedimentPaleontologyEngineeringPhysical chemistryElectronic and Structural Properties of OxidesSemiconductor materials and devicesAnalytical Chemistry and Sensors