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Critical Role of Intermetallic Particles in the Corrosion of 6061 Aluminum Alloy and Anodized Aluminum Used in Semiconductor Processing Equipment

Yang Zhao, Bo He, Jinliang Yang, Yongxiang Liu, Tao Zhang, Fuhui Wang

2025Acta Metallurgica Sinica (English Letters)7 citationsDOI

Topics & Concepts

Materials scienceIntermetallicAnodizingMetallurgyAluminiumAlloyCorrosionSemiconductorOptoelectronicsAnodic Oxide Films and NanostructuresAluminum Alloy Microstructure PropertiesCorrosion Behavior and Inhibition
Critical Role of Intermetallic Particles in the Corrosion of 6061 Aluminum Alloy and Anodized Aluminum Used in Semiconductor Processing Equipment | Litcius